Dual color with sub display at a glance
CE Approved
CE : EMC Directive
The setting conditions are displayed on the sub display, making it much easier to keep track of operations.
In addition, the digital display which switches between 2 colors lets you check the status of sensor operation at a glance.
A new rectification mechanism and Micro Electro Mechanical System (MEMS) technology allow the sensor to be mounted on a Si sensor chip (3 x 3.5 mm0.118 x 0.138 in). This provides an extremely small heat capacity, high precision of ±3 % F.S. and high-speed response. The two temperature sensors on each side of the heater detect the heat distribution to make bidirectional detection possible.
A single sensor can detect flows bidirectionally. In addition, it can be set to detect flows in either the forward or reverse direction only, making it suitable for a variety of applications.
The rectification method used by the new mechanism makes straight pipes unnecessary at both the intake and exhaust sides.
Quick connection is possible with a cover-attached connector.
Other than the ability to carry out bidirectional detection, there are no limitations on the installation direction, making the installation very flexible.
The FM-200 series can control and manage flows in a wide variety of output modes such as integrated output mode, depending on the required application.
Integrated output mode
■ Quality control
When the volume of flow of the gas being measured reaches the set integrated value, output switches to ON or OFF.
・Controls N2 charging volumes for electronic components
・Controls air blowing volumes, etc.
Integrated pulse output mode
■ Cost management
The pulse output is generated once at every specified integrated value*. This lets you know the amount of air consumed per unit of time easily.
* Integrated values are specified by range and can vary. For details, refer to “SPECIFICATIONS”.
・Controls N2 purge volumes in reflow furnaces
・Controls overall volumes of air consumed by equipment, etc.
■ Energy-saving and environmental-friendly
The pulse output from the flow sensor can be inputted to the pulse counter of an Eco-Power Meter so that air consumption and power consumption can both be measured simultaneously.
Notes:
1) Displayed value data is not outputted.
2) For details, refer to “KW8M Eco-Power Meter”.
Type | Resin body type | ||||||
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Model No. | FM-252-4(-P) | FM-213-4(-P) | FM-253-4(-P) | FM-214-4(-P) | FM-254-8(-P) | FM-215-8(-P) | |
Full scale flow rate (Note 1) |
500 mℓ/min. | 1,000 mℓ/min. | 5 ℓ/min. | 10 ℓ/min. | 50 ℓ/min. | 100 ℓ/min. | |
Instant flow rate |
Display range (Note 2) |
-550 to +550 mℓ/min. | -1,100 to +1,100 mℓ/min. | -5.5 to +5.5 ℓ/min. | -11 to +11 ℓ/min. | -55 to +55 ℓ/min. | -110 to +110 ℓ/min. |
Setting and display resolution | 1 mℓ/min. | 0.01 ℓ/min. | 0.1 ℓ/min. | ||||
Integrated flow rate |
Display range (Note 2) |
±9999999 mℓ | ±99999.99 ℓ | ±999999.9 ℓ | |||
Setting and display resolution | 1 mℓ | 0.01 ℓ | 0.1 ℓ | ||||
Specified integrated value | 5 mℓ | 10 mℓ | 0.05 ℓ | 0.1 ℓ | 0.5 ℓ | 1 ℓ | |
Port size | ø4 ø0.157 push-in | ø8 ø0.315 push-in | |||||
Weight | Net weight: 50 g approx., Gross weight: 115 g approx. | Net weight: 70 g approx., Gross weight: 135 g approx. |
Type | Aluminum body type | ||||
---|---|---|---|---|---|
Model No. | FM-255-AR2(-P) | FM-255-AG2-P | FM-216-AR2(-P) | FM-216-AG2-P | |
Full scale flow rate (Note 1) |
500 ℓ/min. | 1,000 ℓ/min. | |||
Instant flow rate |
Display range (Note 2) |
-550 to +550 ℓ/min. | -1,100 to +1,100 ℓ/min. | ||
Setting and display resolution | 1 ℓ/min. | ||||
Integrated flow rate |
Display range (Note 2) |
±9999999 ℓ | |||
Setting and display resolution | 1 ℓ | ||||
Specified integrated value | 5 ℓ | 10 ℓ | |||
Port size | Rc1/2 female thread | G1/2 female thread | Rc1/2 female thread | G1/2 female thread | |
Weight | Net weight: 155 g approx., Gross weight: 220 g approx. |
Type | NPN output type | PNP output type | |
---|---|---|---|
Model No. | FM-2□ | FM-2□-P | |
Rated pressure range | -0.09 to +0.7 MPa | ||
Pressure withstandability | 1 MPa | ||
Applicable fluid | Clean air (Note 3), compressed air (Note 3), nitrogen gas | ||
Supply voltage | 12 to 24 V DC ± 10 % Ripple P-P10 % or less | ||
Current consumption | Normal mode: 60 mA or less, ECO mode: 40 mA or less | ||
Comparative outputs (Comparative output 1 / Comparative output 2) |
NPN open-collector transistor ・Maximum sink current: 50 mA or less ・Applied voltage: 26.4 V DC or less (between comparative output and 0 V) ・Residual voltage: 2.4 V or less (at 50 mA sink current) |
PNP open-collector transistor ・Maximum source current: 50 m A or less ・Applied voltage: 26.4 V DC or less (between comparative output and +V) ・Residual voltage: 2.4 V or less (at 50 mA source current) |
|
Output modes | Output OFF mode, window comparator mode, hysteresis mode, integrated output mode, integrated pulse output mode | ||
Short-circuit protection | Incorporated | ||
Hysteresis | Window comparator mode: 1 to 8 % F.S. approx. (variable) (Factory settings: approx. 1 % F.S.), Hysteresis mode: Variable (minimum 1 digit) | ||
Response time | 50 ms, 80 ms, 120 ms, 200 ms, 400 ms, 800 ms, 1,500 ms, selectable by key operation | ||
Analog voltage output | Output voltage: 1 to 5 V, Output impedance: 1 kΩ approx. [Refer to “Analog voltage output” for more details.] |
||
Repeatability | Within ±1 % F.S. | ||
Accuracy assurance range (Note 4) |
Bi-direction : -100 to -3 % F.S., +3 to +100 % F.S. One-side direction : +3 to +100 % F.S. |
||
External input | ON voltage: 0 to +0.4 V OFF voltage: +5 V to +V, or open Input time: 80 ms or more |
ON voltage: +5 V to +V OFF voltage: 0 to +0.6 V, or open Input time: 80 ms or more |
|
Linearity | Within ±3 % F.S. (Ambient temperature +25 ℃ +77 ℉, flow rate range 3 to 100 % F.S., atmospheric criteria on secondary side) | ||
Display | 4 digits + 4 digits 2-color LCD display (Display refresh rate: 250 ms, 500 ms, 1,000 ms, selectable by key operation) | ||
Protection | IP40 (IEC) | ||
Ambient temperature | 0 to +50 ℃ +32 to +122 ℉ (No dew condensation allowed), Storage: -10 to +60 ℃ +14 to +140 ℉ |
||
Ambient humidity | 35 to 90 % RH, Storage: 35 to 90 % RH | ||
Voltage withstandability | 1,000 V AC for one min. between all supply terminals connected together and enclosure (Excluding the aluminum body type) | ||
Insulation resistance | 10 MΩ, or more, with 500 V DC megger between all supply terminals connected together and enclosure (Excluding the aluminum body type) | ||
Vibration resistance / Shock resistance |
10 to 150 Hz frequency, 0.75 mm 0.030 in amplitude or 49 m/s2 max. acceleration, in X, Y and Z directions for two hours each / 100 m/s2 acceleration (10 G approx.) in X, Y and Z directions for three times each | ||
Temperature characteristics | Within ±0.2 % F.S./℃ (+25 ℃ +77 ℉ criteria, +15 to +35 ℃ +59 to +95 ℉ ambient temperature range) | ||
Pressure characteristics | Within ±5 % F.S. (-0.09 to +0.7 MPa, +25 ℃ +77 ℉, atmospheric criteria on secondary side) | ||
Enclosure earthing | Floating (Note 5) | ||
Material | Enclosure: ABS, Body: Polyamide (Aluminum body type: Aluminum), Switch: EPDM, Display: Acrylic, Mounting screw part (Resin body type): Brass current plate / port filter: Stainless steel (used for the gas contact area), Sensor chip: Silicon, Gasket: Fluorine rubber | ||
Connecting method | Connector | ||
Cable length | Total length up to 10 m 32.808 ft is possible with 0.3 mm2, or more, cable. | ||
Accessory | CN-F15-C1 (Connector attached cable 1 m 3.281 ft): 1 pc. |
Note 1 :Converted to volumetric flow at +20 ℃ +68 ℉ and 1 atmospheric pressure (101 kPa).
Note 2 :The display flow rate range is the case when setting to bi-direction at the flow direction setting. When the flow direction is set to one-side forward direction or one-side reverse direction, the negative side of the display flow rate range shows 10 % of the full-scale (F.S.).
Note 3 :The clean air complies with JIS B 8392-1.1.1 to 5.6.2, and the compressed air complies with JIS B 8392-1.1.1 to 1.6.2.
Note 4 :Take care that if fluid flows in the vicinity of zero-point which is out of the accuracy assurance range, the instant flow rate value may forcibly display “zero”, or the integrated flow display value may not be counted up, or the integrated pulse output may not be outputted.
Note 5 :As a varistor (clamping voltage: approx. 40 V) is connected to the aluminum body type, do not apply voltage higher than the rated voltage of the sensor.